Optical MEMS (microspheres and ring resonators): Overview of recent progress

V Sadasivan - MEMS Applications in Electronics and Engineering, 2023 - pubs.aip.org
Micro-or nano-opto-electromechanical systems (MOEMS/NOEMS) are used for sensing
(Basu et al., 2021b), processing and actuation, in diverse applications. Common sensing …
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7 OPTICAL MEMS (MICROSPHERES AND RING RESONATORS): OVERVIEW OF RECENT PROGRESS

V Sadasivan - MEMS Applications in Electronics and Engineering, 2023 - pubs.aip.org
Micro-or nano-opto-electromechanical systems (MOEMS/NOEMS) are used for sensing
(Basu et al., 2021b), processing and actuation, in diverse applications. Common sensing …