Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform

P Gothoskar, M Ghiron, V Patel… - US Patent …, 2005 - Google Patents
A photodetector for use with relatively thin (ie, Sub micron) Silicon optical waveguides
formed in a silicon-on insulator (SOI) structure comprises a layer of poly germanium …
被引用次数：75 相关文章

Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform

P Gothoskar, M Ghiron, V Patel… - US Patent …, 2005 - freepatentsonline.com
A photodetector for use with relatively thin (ie, sub-micron) silicon optical waveguides
formed in a silicon-on-insulator (SOI) structure comprises a layer of poly-germanium …

Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform

P Gothoskar, M Ghiron, V Patel… - US Patent App. 10 …, 2004 - Google Patents
(57) ABSTRACT A photodetector for use with relatively thin (ie, Sub micron) Silicon optical
waveguides formed in a silicon-on insulator (SOI) structure comprises a layer of poly-germa …

Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform

P Gothoskar, M Ghiron, V Patel… - US Patent App. 10 …, 2004 - freepatentsonline.com
A photodetector for use with relatively thin (ie, sub-micron) silicon optical waveguides
formed in a silicon-on-insulator (SOI) structure comprises a layer of poly-germanium …