[图书][B] Visually-guided multi-probe microassembly of spatial microelectromechanical systems
JD Wason - 2011 - dl.acm.org
Visually guided multi-probe microassembly is a novel method to assemble microparts to
produce micro-electromechanical system (MEMS) devices consisting of multiple microparts …
produce micro-electromechanical system (MEMS) devices consisting of multiple microparts …
Visually-guided multi-probe microassembly of spatial microeletromechanical systems
JD Wason - 2011 - dspace.rpi.edu
Visually guided multi-probe microassembly is a novel method to assemble microparts to
produce micro-electromechanical system (MEMS) devices consisting of multiple microparts …
produce micro-electromechanical system (MEMS) devices consisting of multiple microparts …
VISUALLY-GUIDED MULTI-PROBE MICROASSEMBLY OF SPATIAL MICROELECTROMECHANICAL SYSTEMS
JD Wason - 2011 - dspace.rpi.edu
Visually guided multi-probe microassembly is a novel method to assemble microparts to
produce micro-electromechanical system (MEMS) devices consisting of multiple microparts …
produce micro-electromechanical system (MEMS) devices consisting of multiple microparts …