An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas

WY Liu, Y Xu, YX Liu, F Peng, Q Guo, XS Li… - Journal of Applied …, 2015 - pubs.aip.org
An tunable diode laser absorption spectroscopy has been used to determine the Ar*(3P2)
and Ar*(3P0) metastable atoms densities in dual-frequency capacitively coupled plasmas …
被引用次数：8 相关文章

An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas

WY Liu, Y Xu, YX Liu, F Peng, Q Guo, XS Li… - Journal of Applied …, 2015 - pubs.aip.org
An tunable diode laser absorption spectroscopy has been used to determine the Ar*(3 P 2)
and Ar*(3 P 0) metastable atoms densities in dual-frequency capacitively coupled plasmas …

An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas

WY Liu, Y Xu, F Peng, Q Guo, XS Li, AM Zhu… - Journal of Applied …, 2015 - osti.gov
An tunable diode laser absorption spectroscopy has been used to determine the Ar*({sup 3}
P {sub 2}) and Ar*({sup 3} P {sub 0}) metastable atoms densities in dual-frequency …

An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas

WY Liu, Y Xu, F Peng, Q Guo, XS Li, AM Zhu… - Journal of Applied …, 2015 - inis.iaea.org
[en] An tunable diode laser absorption spectroscopy has been used to determine the Ar*(3 P
2) and Ar*(3 P 0) metastable atoms densities in dual-frequency capacitively coupled …

An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas

WY Liu, Y Xu, YX Liu, F Peng, Q Guo… - Journal of Applied …, 2015 - ui.adsabs.harvard.edu
An tunable diode laser absorption spectroscopy has been used to determine the Ar*(3 P 2)
and Ar*(3 P 0) metastable atoms densities in dual-frequency capacitively coupled plasmas …