Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications

M Dekkers, M Nguyen, N Hildebrand… - Advanced Materials …, 2017 - sintef.brage.unit.no
Pb (Zr, Ti) O3 (PZT) and (PhMg1/3Nb2/3O3) 2/3-CPbTiO3) 1/3 (PMN-PT) thin films are
epitaxially deposited on 200 mm wafers using Solmates' Pulsed Laser Deposition (PLD) …
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Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications

M Dekkers, M Nguyen, N Hildenbrand… - TechConnect World …, 2017 - research.ibm.com
Abstract Pb (Zr, Ti) O3 (PZT) and (PhMg1/3Nb2/3O3) 2/3-CPbTiO3) 1/3 (PMN-PT) thin films
are epitaxially deposited on 200 mm wafers using Solmates' Pulsed Laser Deposition (PLD) …