P Rantakari, V Kaajakari, T Mattila, J Kiihamäki… - … Conference on Solid …, 2005 - cris.vtt.fi
A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated
electronics are used to implement a 13-MHz oscillator that has noise floor of-147 dBc/Hz …