Investigation of Cu/low-k film delamination in flip chip packages

U Ozkan, A Dubey, RN Master - 56th Electronic Components …, 2006 - ieeexplore.ieee.org
Chip-package-interaction (CPI) induced BEoL (back-end-of-line) delamination has emerged
as a major reliability concern with the adoption of Cu/low-k as the mainstream BEoL …

Investigation of Cu/low-k film delamination in flip chip packages

CJ Zhai, U Ozkan, A Dubey, RC Blish, RN Master - 56th Electronic Components … - infona.pl
Chip-package-interaction (CPI) induced BEoL (back-end-of-line) delamination has emerged
as a major reliability concern with the adoption of Cu/low-k as the mainstream BEoL …

[引用][C] Investigation of Cu/low-k film delamination in flip chip packages

CJ ZHAI - Proc. 56th Electronic Components and Technol. Conf …, 2006 - cir.nii.ac.jp
Investigation of Cu/low-k film delamination in flip chip packages | CiNii Research CiNii 国立
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