Thin Film-Based Sensor for Motor Vehicle Exhaust Gas, Nh3, and Co Detection

S Sujarwata, P Marwoto… - Jurnal Pendidikan Fisika …, 2016 - journal.unnes.ac.id
A copper phthalocyanine (CuPc) thin film based gas sensor with FET structure and channel
length 100? m has been prepared by VE method and lithography technique to detect NH3 …
被引用次数：2 相关文章

Thin Film-based Sensor for Motor Vehicle Exhaust Gas, Nh3, and Co Detection

S Sujarwata, P Marwoto, L Handayani - Indonesian Journal of Physics … - neliti.com
ABSTRACT A copper phthalocyanine (CuPc) thin film based gas sensor with FET structure
and channel length 100 μm has been prepared by VE method and lithography technique to …
[PDF] academia.edu

[PDF][PDF] THIN FILM-BASED SENSOR FOR MOTOR VEHICLE EXHAUST GAS, NH

Jurnal Pendidikan Fisika, 2016 - academia.edu
ABSTRACT A copper phthalocyanine (CuPc) thin film based gas sensor with FET structure
and channel length 100 μm has been prepared by VE method and lithography technique to …