Design and analysis of a novel MOEMS gyroscope using an electrostatic comb-drive actuator and an optical sensing system

A Sheikhaleh, K Jafari, K Abedi - IEEE Sensors Journal, 2018 - ieeexplore.ieee.org
In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of
an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system …
被引用次数：35 相关文章

[引用][C] Design and Analysis of a Novel MOEMS Gyroscope Using an Electrostatic Comb-Drive Actuator and an Optical Sensing System

A Sheikhaleh, K Jafari, K Abedi - IEEE Sensors Journal, 2019 - ui.adsabs.harvard.edu
Design and Analysis of a Novel MOEMS Gyroscope Using an Electrostatic Comb-Drive
Actuator and an Optical Sensing System - NASA/ADS Now on home page ads icon ads Enable …