Full View

Analysis of manufacturing-scale MEMS reliability testing

KM Delak, P Bova, AL Hartzell… - MEMS Reliability for …, 1999 - spiedigitallibrary.org
Long-term reliability of MEMS devices is increasingly important for large scale manufactured
products. Traditional reliability testing used for microelectronic devices has been applied to …
被引用次数：25 相关文章

Analysis of manufacturing-scale MEMS reliability testing

KM Delak, P Bova, AL Hartzell… - MEMS Reliability for …, 1999 - ui.adsabs.harvard.edu
Long-term reliability of MEMS devices is increasingly important for large scale manufactured
products. Traditional reliability testing used for microelectronic devices has been applied to …

[引用][C] Analysis of manufacturing scale MEMS reliability testing

KM DELAK, P BOVA, AL HARTZELL… - SPIE proceedings …, 1999 - pascal-francis.inist.fr
Analysis of manufacturing scale MEMS reliability testing CNRS Inist Pascal-Francis CNRS
Pascal and Francis Bibliographic Databases Simple search Advanced search Search by …

Analysis of Manufacturing Scale MEMS Reliability Testing

KM Delak, P Bova, AL Hartzell, DJ Woodilla - spiedigitallibrary.org
Long-term reliability of MEMS devices is increasingly important for large scale manufactured
products. Traditional reliability testing used for microelectronic devices has been applied to …

[引用][C] Analysis of manufacturing scale MEMS reliability testing

KM DELAK, P BOVA… - SPIE …, 1999 - Society of Photo-Optical …