Dual plasma microwave apparatus and method for treating a surface

TA Roppel, J Asmussen, DK Reinhard - US Patent 4,691,662, 1987 - Google Patents
A plasma apparatus which generates a radio frequency (UHF or microwave) disk plasma 16
and a hybrid plasma 45 derived from the disk plasma. The microwave plasma acts as a …

Dual plasma microwave apparatus and method for treating a surface

TA Roppel, J Asmussen… - US Patent 4,691,662, 1987 - freepatentsonline.com
A plasma apparatus which generates a radio frequency (UHF or microwave) disk plasma 16
and a hybrid plasma 45 derived from the disk plasma. The microwave plasma acts as a …