Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Z Hao, F Ayazi - Sensors and Actuators A: Physical, 2007 - Elsevier
This paper presents a comprehensive analysis of support loss, the dominant loss
mechanism, in center-supported micromechanical disk resonators operating in their radial …
被引用次数：98 相关文章

Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Z Hao, F Ayazi - Sensors and Actuators A: Physical, 2007 - ui.adsabs.harvard.edu
This paper presents a comprehensive analysis of support loss, the dominant loss
mechanism, in center-supported micromechanical disk resonators operating in their radial …

Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Z Hao, F Ayazi - Sensors & Actuators: A. Physical, 2007 - infona.pl
This paper presents a comprehensive analysis of support loss, the dominant loss
mechanism, in center-supported micromechanical disk resonators operating in their radial …

[引用][C] Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Z HAO, F AYAZI - Sensors and actuators. A, Physical, 2007 - Elsevier