Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
J Teva, G Murillo, J Giner - Journal of Micromechanics and …, 2008 - iopscience.iop.org
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
JL Lopez, J Verd, JL Teva… - Journal of …, 2009 - digital.csic.es
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
JL Lopez, J Verd, J Teva, G Murillo… - Journal of …, 2009 - portalrecerca.uab.cat
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
[引用][C] Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
JL LOPEZ, J VERD, J TEVA… - Journal of …, 2009 - pascal-francis.inist.fr
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies CNRS
Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …
Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres… - 2009 - arch.neicon.ru
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
JL Lopez, J Verd, J Teva, G Murillo, J Giner… - … , Devices and Systems, 2009 - inis.iaea.org
[en] Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
JL Lopez, J Verd, J Teva, G Murillo, J Giner… - … of Micromechanics and …, 2009 - osti.gov
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
JL Lopez, J Verd, J Teva, G Murillo… - Journal of …, 2009 - ui.adsabs.harvard.edu
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …