Silicon capillary gripper with self-alignment capability
V Sariola, V Liimatainen, T Tolonen… - … on Robotics and …, 2011 - ieeexplore.ieee.org
This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon
using deep reactive ion etching and is designed to be especially suitable for self alignment …
using deep reactive ion etching and is designed to be especially suitable for self alignment …
Silicon capillary gripper with self-alignment capability
V Sariola, V Liimatainen, T Tolonen… - … on Robotics and …, 2011 - researchportal.tuni.fi
This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon
using deep reactive ion etching and is designed to be especially suitable for self-alignment …
using deep reactive ion etching and is designed to be especially suitable for self-alignment …
[引用][C] Silicon capillary gripper with self-alignment capability
V Sariola, V Liimatainen, T Tolonen… - … on Robotics and …, 2011 - research.aalto.fi
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Silicon capillary gripper with self-alignment capability
V Sariola, V Liimatainen, T Tolonen, R Udd, Q Zhou - 2011 IEEE International … - infona.pl
This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon
using deep reactive ion etching and is designed to be especially suitable for self-alignment …
using deep reactive ion etching and is designed to be especially suitable for self-alignment …