J Zhao, X Wang, Y Zhao, GM Xia, AP Qiu… - IEEE Journal of Solid …, 2017 - cir.nii.ac.jp
A 0.23- $\mu \text{g}$ Bias Instability and 1- $\mu \text{g}/\surd $ Hz Acceleration Noise Density
Silicon Oscillating Accelerometer With Embedded Frequency-to-Digital Converter in PLL | CiNii …