Design and fabrication of a 4-terminal in-plane nanoelectromechanical relay

Y Li, SJ Bleiker, P Edinger, E Worsey… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
We present 4-terminal (4-T) silicon (Si) nanoelectron-mechanical (NEM) relays fabricated on
silicon-on-insulator (SOI) wafers. We demonstrate true 4-T switching behavior with isolated …
被引用次数：1 相关文章

Design and fabrication of a 4-terminal in-plane nanoelectromechanical relay

Y Li, SJ Bleiker, P Edinger, E Worsey… - … The 22nd International …, 2023 - diva-portal.org
ABSTRACT We present 4-terminal (4-T) silicon (Si) nanoelectronmechanical (NEM) relays
fabricated on silicon-oninsulator (SOI) wafers. We demonstrate true 4-T switching behavior …
[PDF] ugent.be

[PDF][PDF] DESIGN AND FABRICATION OF A 4-TERMINAL IN-PLANE NANOELECTROMECHANICAL RELAY

Y Li, SJ Bleiker, P Edinger, E Worsey, MK Kulsreshath… - 2023 - fotonica.intec.ugent.be
ABSTRACT We present 4-terminal (4-T) silicon (Si) nanoelectronmechanical (NEM) relays
fabricated on silicon-oninsulator (SOI) wafers. We demonstrate true 4-T switching behavior …
[PDF] ugent.be

[PDF][PDF] DESIGN AND FABRICATION OF A 4-TERMINAL IN-PLANE NANOELECTROMECHANICAL RELAY

Y Li, SJ Bleiker, P Edinger, E Worsey, MK Kulsreshath… - 2023 - photonics.intec.ugent.be
ABSTRACT We present 4-terminal (4-T) silicon (Si) nanoelectronmechanical (NEM) relays
fabricated on silicon-oninsulator (SOI) wafers. We demonstrate true 4-T switching behavior …

Design and Fabrication of A 4-Terminal In-Plane Nanoelectromechanical Relay

Y Li, SJ Bleiker, P Edinger, E Worsey… - … Conference on Solid …, 2023 - diva-portal.org
We present 4-terminal (4-T) silicon (Si) nanoelectron-mechanical (NEM) relays fabricated on
silicon-on-insulator (SOI) wafers. We demonstrate true 4-T switching behavior with isolated …