Investigation of energy loss mechanisms in micromechanical resonators

WT Park - … '03. 12th International Conference on Solid-State …, 2003 - ieeexplore.ieee.org
Micromechanical resonators with resonant frequencies from 500 kHz to 10 MHz were built
and examined for several energy loss mechanisms. Thermoelastic damping, clamping loss …
被引用次数：74 相关文章
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[PDF][PDF] INVESTIGATION OF ENERGY LOSS MECHANISMS IN MICROMECHANICAL RESONATORS

RN Candler, H Li, M Lutz, WT Park, A Partridge… - engineering.purdue.edu
Micromechanical resonators with resonant frequencies from 500kHz to 10MHz were built
and examined for several energy loss mechanisms. Thermoelastic damping, clamping loss …