Electric force microscopy: gigahertz and nanometer measurement tool

C Böhm - Microelectronic Engineering, 1996 - Elsevier
Following existing trends in microelectronic engineering scanning force microscope test
systems have been developed as a tool for sub micron device characterisation. Performance …
被引用次数：15 相关文章

[引用][C] Electric force microscopy: gigahertz and nanometer measurement tool

C Böhm - Proceedings of the fifth European conference on …, 1996 - dl.acm.org
Electric force microscopy | Proceedings of the fifth European conference on Electron and optical
beam testing of electronic devices skip to main content ACM Digital Library home ACM home …

Electric Force Microscopy: Gigahertz and Nanometer Measurement Tool

C Böhm - Microelectronic Engineering, 1996 - infona.pl
Following existing trends in microelectronic engineering scanning force microscope test
systems have been developed as a tool for sub micron device characterisation. Performance …

[引用][C] Electric force microscopy: Gigahertz and nanometer measurement tool

C Böhm - Microelectronic Engineering, 1996 - cir.nii.ac.jp

Electric Force Microscopy: Gigahertz and Nanometer Measurement Tool

C Bohm - Microelectronic Engineering, 1996 - elibrary.ru
Following existing trends in microelectronic engineering scanning force microscope test
systems have been developed as a tool for sub micron device characterisation. Performance …

[引用][C] Electric force microscopy: gigahertz and nanometer measurement tool

C Böhm - Microelectronic Engineering, 1996 - dl.acm.org
Electric force microscopy: gigahertz and nanometer measurement tool: Microelectronic
Engineering: Vol 31, No 1-4 skip to main content ACM Digital Library home ACM home Google …