Laterally actuated nanoelectromechanical relays with compliant, low resistance contact

WS Lee, KL Harrison, J Provine, S Mitra… - 2013 IEEE 26th …, 2013 - ieeexplore.ieee.org
Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are
presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium …
被引用次数：11 相关文章

Laterally actuated nanoelectromechanical relays with compliant, low resistance contact

M Shavezipur, WS Lee, KL Harrison, J Provine… - 2013 IEEE 26th … - infona.pl
Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are
presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium …