Microfabrication techniques for integrated sensors and microsystems
Science, 1991 - science.org
Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …
very large scale integrated circuits and nonelectronic monitoring and control applications …
[引用][C] Microfabrication techniques for integrated sensors and microsystems
KD WISE - Science, 1991 - cir.nii.ac.jp
Microfabrication techniques for integrated sensors and microsystems | CiNii Research CiNii
国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データを …
国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データを …
Microfabrication techniques for integrated sensors and microsystems
KD Wise, K Najafi - Science, 1991 - ui.adsabs.harvard.edu
Progress continues to be made in the refinement of fabrication methods for microstructures,
sensors, interface circuits, and microactuators with batch-silicon process technologies. Many …
sensors, interface circuits, and microactuators with batch-silicon process technologies. Many …
Microfabrication Techniques for Integrated Sensors and Microsystems
KD Wise, K Najafi - Science, 1991 - JSTOR
Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …
very large scale integrated circuits and nonelectronic monitoring and control applications …
Microfabrication techniques for integrated sensors and microsystems
KD Wise, K Najafi - Science, 1991 - go.gale.com
THE DRAMATIC PROGRESS MADE BY MICROELECTRONICS over the past 30 years in
obvious today in nearly all aspects of society. The number of transistors that can be …
obvious today in nearly all aspects of society. The number of transistors that can be …
Microfabrication Techniques for Integrated Sensors and Microsystems
KD Wise, K Najafi - Science, 1991 - search.proquest.com
Microfabrication techniques for integrated sensors and microsystems are discussed. This
technology provides the interface between very large scale integrated circuits and non …
technology provides the interface between very large scale integrated circuits and non …
Microfabrication techniques for integrated sensors and microsystems
KD Wise, K Najafi - Science (New York, NY), 1991 - pubmed.ncbi.nlm.nih.gov
Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …
very large scale integrated circuits and nonelectronic monitoring and control applications …
Microfabrication techniques for integrated sensors and microsystems.
KD Wise, K Najafi - Science, 1991 - elibrary.ru
Examines trends in the microfabrication techniques for integrated sensors and
microsystems. Fabrication technologies and emerging sensors; Bulk micromachining; Wafer …
microsystems. Fabrication technologies and emerging sensors; Bulk micromachining; Wafer …
Microfabrication techniques for integrated sensors and microsystems.
KD Wise, K Najafi - Science (New York, NY), 1991 - europepmc.org
Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …
very large scale integrated circuits and nonelectronic monitoring and control applications …