KD Wise, K Najafi - Science, 1991 - ui.adsabs.harvard.edu
Progress continues to be made in the refinement of fabrication methods for microstructures, sensors, interface circuits, and microactuators with batch-silicon process technologies. Many …
Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications …
THE DRAMATIC PROGRESS MADE BY MICROELECTRONICS over the past 30 years in obvious today in nearly all aspects of society. The number of transistors that can be …
KD Wise, K Najafi - Science, 1991 - search.proquest.com
Microfabrication techniques for integrated sensors and microsystems are discussed. This technology provides the interface between very large scale integrated circuits and non …
KD Wise, K Najafi - Science (New York, NY), 1991 - pubmed.ncbi.nlm.nih.gov
Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications …
Examines trends in the microfabrication techniques for integrated sensors and microsystems. Fabrication technologies and emerging sensors; Bulk micromachining; Wafer …
KD Wise, K Najafi - Science (New York, NY), 1991 - europepmc.org
Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications …
[引用][C]Microfabrication techniques for integrated sensors and microsystems
KD WISE, K NAJAFI - Science, 1991 - American Association for the …