[引用][C] Development of a RF MEMS Capacitive Shunt Switch for Ka Band DMTL PhaseShifter

G Yang, J Xiaohui, Q Ran - 纳米技术与精密工程, 2012
被引用次数：1 相关文章
[PDF] nycu.edu.tw

微機械邏輯閘

郭威廷， 陳宗麟 - 2005 - ir.lib.nycu.edu.tw
… The plate is perforated for the ease of fabrication and the control of air damping effect during
gate operation. The plate is tilted by the torque, and the dimples at both sides of the seesaw …
相关文章
[PDF] ntu.edu.tw

應用電感耦合型電漿蝕刻且與CMOS 製程相容之微機電微波濾波器及生醫遞送藥箱

黃本立 - 2012 - tdr.lib.ntu.edu.tw
… RF MEMS capacitive switches were first invented as a means of achieving the low RF loss
afforded by MEMS and micromachining technology. By 1998, the University of Michigan, the …
相关文章
[PDF] ntu.edu.tw

利用親水性質發展之自組式微透鏡與以離子導電高分子金屬複合物製備之低致動電壓可形變面鏡

魏祥鈞 - 2012 - tdr.lib.ntu.edu.tw
… This method provides a low cost, low time consumption, no etch transfer, low temperature,
and no photo lithography method to fabricate MLA. We applied this method to fabricated …
相关文章

[引用][C] … 核心是利用表面张力, 在合金熔融池的表面形成合金通孔柱. 此外, 采用一种定制设备来实现通孔的自动填充. 这一方法和相关设备在采用TSV 的MEMS 器件封装制造 …

J Gu, B Liu, X Li
相关文章