… properties of low-k nano-porous silica and the impact of … performed with lithography and etchingprocesses. In our proposed … effects on the n-type poly-Si TFT with/without LDD structure …
… Solvent effect on the pore size of porouslow-k films ........................… 2.5 Challenge of porous lowk integration Porouslowk … uptake Porouslowk may absorb moisture in wet etching, wet …
… layer on the top of porous or hybrid low-k films. Such thin but … by processing steps such as CMP, post-etch cleaning, post-… to investigate the impact of porogens and porosity on the …
… the effect of different kinds of plasma on porouslow-k … ) materials by using standard and remote plasma methods, and … dielectric film worse such as the etching rate by HF, and because …
… in a stripline structure with spin-coated porous-SiLK low-k film. … Except the k value, the impact of low-k materials on process … photo-lithography process and dielectric etchprocesses are …
… the structure-property relationship of NCS porouslow-k thin … Their impact on the final properties of NCS porouslow-k thin film … the PSZ low-k film was subjected to etch or ash process; it …
… process to observe the effect of silicon wafer material after laser drill. Parameters used in this work are speed, path and power. The effect of … grooving on 45 nm low-k wafer is conducted. …
… compatibility of low-k materials on semiconductor process. On … and hardness due to decreasing micro-porous. However, a bit … Cu and low-k film as Cu diffusion barrier and etching stop …