Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations

WM Van Spengen - Journal of Micromechanics and …, 2012 - iopscience.iop.org
… issues hampering capacitive RF MEMS switches in their … It is concluded that viable
capacitive RF MEMS switches with … number of dielectric-less MEMS switch designs. However, a …

Design of a novel structure capacitive RF MEMS switch to improve performance parameters

GS Kondaveeti, K Guha, SR Karumuri… - IET Circuits, Devices …, 2019 - Wiley Online Library
… have designed and analysed a capacitive shunt RF MEMS switch with low actuation voltage
and low insertion losses and high isolation. Here, a novel step-down switch is proposed to …

Fabrication and characterization of capacitive RF MEMS perforated switch

KS Rao, LN Thalluri, K Guha, KG Sravani - IEEE Access, 2018 - ieeexplore.ieee.org
… designed in this paper is a electrostatically actuated vertically deflective shunt capacitive
RF MEMS switch. Therefore, the switch requiring an actuation voltage of 5.5V to get 1.8 µm …

RF power handling of capacitive RF MEMS devices

B Pillans, J Kleber, C Goldsmith… - 2002 IEEE MTT-S …, 2002 - ieeexplore.ieee.org
RF MEMS devices need to be explored in order to better define in what applications RF MEMS
switches … and resulting reliability of capacitive MEMS switches at various RF power levels. …

Charging in dielectricless capacitive RF-MEMS switches

D Mardivirin, A Pothier, A Crunteanu… - IEEE transactions on …, 2008 - ieeexplore.ieee.org
… failure of RF-MEMS capacitive switches was … of RF-MEMS switches [1]. Later, in [2], it has
been shown that measuring the drift in pull-in/pull-out voltages of a capacitive RF-MEMS switch

Lifetime characterization of capacitive RF MEMS switches

C Goldsmith, J Ehmke, A Malczewski… - 2001 IEEE MTT-S …, 2001 - ieeexplore.ieee.org
… ABSTRACT - The first experimental characterization of dielectric charging within capacitive
RF MEMS switches has been demonstrated. Standard devices have been inserted into a …

A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches

WM Van Spengen, R Puers, R Mertens… - Journal of …, 2004 - iopscience.iop.org
… A typical example of a capacitive RF MEMS switch is shown in figure 1. It consists of a
freestanding plate suspended by beams above a coplanar waveguide (CPW). Under this ‘bridge’, …

Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis

Y Zhu, HD Espinosa - Journal of Micromechanics and …, 2004 - iopscience.iop.org
Capacitive MEMS switch operation A typical capacitive RF MEMS switch consists of a
fixed–fixed thin metallic membrane suspended over a bottom electrode insulated by a dielectric …

A novel capacitive RF-MEMS switch for multi-frequency operation

M Angira, D Bansal, P Kumar, K Mehta… - Superlattices and …, 2019 - Elsevier
… This paper reports a novel capacitive RF-MEMS switch. The presented device has frequency
reconfigurable characteristics and thus can be used in multi-band wireless systems. The …

Capacitive RF MEMS Switches Fabricated in Standard 0.35- CMOS Technology

S Fouladi, RR Mansour - IEEE transactions on microwave …, 2010 - ieeexplore.ieee.org
… 1 shows the top view and the cross-sectional view of the shunt capacitive RF MEMS switch
implemented using the standard 0.35- m CMOS process. The switch consists of a coplanar …