南雪莉, 张斌珍, 崔建利, 杨昕, 葛少雷 - 红外与毫米波学报, 2017 - journal.sitp.ac.cn
… a silicon substrate[7] , MEMS inertial switches on a metal substrate[8] , MEMS filters[9] , and
in … We choose the sputtering silver thickness (2 μm), which is more than five times higher than …