110 GHz, 110 mW hybrid silicon-lithium niobate Mach-Zehnder modulator

F Valdez, V Mere, X Wang, N Boynton, TA Friedmann… - Scientific reports, 2022 - nature.com
F Valdez, V Mere, X Wang, N Boynton, TA Friedmann, S Arterburn, C Dallo, AT Pomerene
Scientific reports, 2022nature.com
High bandwidth, low voltage electro-optic modulators with high optical power handling
capability are important for improving the performance of analog optical communications
and RF photonic links. Here we designed and fabricated a thin-film lithium niobate (LN)
Mach-Zehnder modulator (MZM) which can handle high optical power of 110 mW, while
having 3-dB bandwidth greater than 110 GHz at 1550 nm. The design does not require
etching of thin-film LN, and uses hybrid optical modes formed by bonding LN to planarized …
Abstract
High bandwidth, low voltage electro-optic modulators with high optical power handling capability are important for improving the performance of analog optical communications and RF photonic links. Here we designed and fabricated a thin-film lithium niobate (LN) Mach-Zehnder modulator (MZM) which can handle high optical power of 110 mW, while having 3-dB bandwidth greater than 110 GHz at 1550 nm. The design does not require etching of thin-film LN, and uses hybrid optical modes formed by bonding LN to planarized silicon photonic waveguide circuits. A high optical power handling capability in the MZM was achieved by carefully tapering the underlying Si waveguide to reduce the impact of optically-generated carriers, while retaining a high modulation efficiency. The MZM has a product of 3.1 V.cm and an on-chip optical insertion loss of 1.8 dB.
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