A closed-loop micromachined accelerometer based on thermal convection
2011 Symposium on Design, Test, Integration & Packaging of MEMS …, 2011•ieeexplore.ieee.org
In this work, we present the frequency analysis of a micromachined thermal accelerometer
based on convection. Open-loop block diagram representation is first introduced to explain
the sensor behavior. New sensor architecture is imagined to enhance sensor characteristics:
a closed-loop configuration is designed by addition of two resistors closed to detectors.
Effects on thermal sensitivity and bandwidth are investigated.
based on convection. Open-loop block diagram representation is first introduced to explain
the sensor behavior. New sensor architecture is imagined to enhance sensor characteristics:
a closed-loop configuration is designed by addition of two resistors closed to detectors.
Effects on thermal sensitivity and bandwidth are investigated.
In this work, we present the frequency analysis of a micromachined thermal accelerometer based on convection. Open-loop block diagram representation is first introduced to explain the sensor behavior. New sensor architecture is imagined to enhance sensor characteristics: a closed-loop configuration is designed by addition of two resistors closed to detectors. Effects on thermal sensitivity and bandwidth are investigated.
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