[PDF][PDF] A flexible fabrication process for RF MEMS devices
RF MEMS are assuming a great importance in the fast evolving telecommunication market
and space applications. In the last years a flexible technology platform has been developed
and continuously optimized at FBK (Italy) for the fabrication of RF MEMS basic components
as well as complex RF circuits working in the frequency range from sub-GHz up to more than
100 GHz. The paper reports about the fabrication process and its capabilities. The most
important process features are described together with some modifications required for the …
and space applications. In the last years a flexible technology platform has been developed
and continuously optimized at FBK (Italy) for the fabrication of RF MEMS basic components
as well as complex RF circuits working in the frequency range from sub-GHz up to more than
100 GHz. The paper reports about the fabrication process and its capabilities. The most
important process features are described together with some modifications required for the …
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