A high precision SOI MEMS–CMOS±4g piezoresistive accelerometer

AL Roy, H Sarkar, A Dutta, TK Bhattacharyya - Sensors and Actuators A …, 2014 - Elsevier
AL Roy, H Sarkar, A Dutta, TK Bhattacharyya
Sensors and Actuators A: Physical, 2014Elsevier
Abstract System development and characterization of a low noise low offset SOI MEMS–
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a
coupled multi-bandwidth variable-gain amplifier block and a thermal sensitivity and offset
compensation block is presented in this work. Custom design and fabrication has been
carried out for both the SOI MEMS sensor and the analog front-end for high precision and
operational reliability. The system is shown to have a scale factor of∼ 4 mV/g and an output …
Abstract
System development and characterization of a low noise low offset SOI MEMS–CMOS PCB-integrated multi-chip ±4g piezoresistive accelerometer sensor comprising a coupled multi-bandwidth variable-gain amplifier block and a thermal sensitivity and offset compensation block is presented in this work. Custom design and fabrication has been carried out for both the SOI MEMS sensor and the analog front-end for high precision and operational reliability. The system is shown to have a scale factor of ∼4 mV/g and an output nonlinearity <1% of full-scale output with a cross-axis sensitivity <1%. Cyclic loading experiments exhibit distortionless operation over ∼1000,000 cycles without failure indicative of an extremely robust system.
Elsevier
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