A microgripper using piezoelectric actuation for micro-object manipulation

SK Nah, ZW Zhong - Sensors and Actuators A: Physical, 2007 - Elsevier
SK Nah, ZW Zhong
Sensors and Actuators A: Physical, 2007Elsevier
Design, fabrication and tests of a monolithic compliant-flexure-based microgripper were
performed. The geometry design and the material stresses were considered through the
finite element analysis. The simulation model was used to study in detail profiles of von
Mises stresses and deformation. The maximum stress in the microgripper is much smaller
than the critical stress values for fatigue. The microgripper prototype was manufactured
using micro-wire electrode discharge machining. A displacement amplification of 3.0 and a …
Design, fabrication and tests of a monolithic compliant-flexure-based microgripper were performed. The geometry design and the material stresses were considered through the finite element analysis. The simulation model was used to study in detail profiles of von Mises stresses and deformation. The maximum stress in the microgripper is much smaller than the critical stress values for fatigue. The microgripper prototype was manufactured using micro-wire electrode discharge machining. A displacement amplification of 3.0 and a maximum stroke of 170μm were achieved. The use of piezoelectric actuation allowed fine positioning. Micromanipulation tests were conducted to confirm potential applications of the microgripper with piezoelectric actuation in handling micro-objects. The simulation and experimental results have proven the good performance of the microgripper.
Elsevier
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