aluminum oxide substrate was demonstrated. In our experiments, Ni was used as an anode
material, while a very small amount of Pt was used as a cathode material, which reduced the
thickness of the thin film cathode to 65 nm. In addition, a plasma-enhanced atomic layer
deposition method was used to prepare a yttria-stabilized zirconia electrolyte. The open
circuit voltage and the peak power density of the as-fabricated fuel cells, both of which were …