A smart sampling algorithm to minimize risk dynamically
S Dauzere-Péres, JL Rouveyrol… - 2010 IEEE/SEMI …, 2010 - ieeexplore.ieee.org
In order to maximize the information and thus to minimize risk from measurement and to take
into account measurement capacities, an algorithm is proposed to sample lots. An indicator,
called Global Sampling Indicator (GSI), has been defined to select the lots to sample, and to
schedule them on the measurement tools. A simulator called S5 (Smart Sampling
Scheduling and Skipping Simulator) has been implemented and validated on actual data. It
shows that the risks can be strongly reduced while keeping a limited number of measures.
into account measurement capacities, an algorithm is proposed to sample lots. An indicator,
called Global Sampling Indicator (GSI), has been defined to select the lots to sample, and to
schedule them on the measurement tools. A simulator called S5 (Smart Sampling
Scheduling and Skipping Simulator) has been implemented and validated on actual data. It
shows that the risks can be strongly reduced while keeping a limited number of measures.
[引用][C] A smart sampling algorithm to minimize risk dynamically. In 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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