by a CMOS compatible front side bulk micromachining technology. This device enables the
measurement of a fingerprint by the way of a mechanical scanning principle of the finger
roughness. While this sensing principle has shown good results on a first prototype of
reduced width, we present here the design, fabrication and test of a new sensor. This sensor
contains 256 pressure sensitive microbeams for a total length of 1.28 cm and is fully …