… absolute calibration of theoretical cross sections applied to actinometry of N and F atoms. …
a detailed description of the actinometry method applied to O, N and F atoms. Next, section 3 is …

… At first sight the time-resolved actinometry … for O-atom recombination by fluorine atoms.
However, we have already seen above that in O/10% SF6 plasmas a large part of the actinometry …

… absorbed by the actinometer because of a low optical path or actinometer concentration, …
If the quantum yield of the actinometer is known, then the absorbed photon flux q p (abs, λ) …

… and oxygen atoms for polymer surface activation [1] and for … the N- and O-atom densities
by optical actinometry using Ar in the percent range in N 2 –O 2 flowing microwave and N 2 DC …

… in quantitative measurements of atomic oxygen in discharges. Laser … of atomic fluorine by
actinometry, first proposed by Coburn and Chen in 19807 and realized, eg, for atomic oxygen …

… ▶ Estimated influence of inaccuracy in EEDF measurements on actinometry results. ▶
Actinometrical coefficients C for O, N and F atoms were obtained as functions of “effective” …

… MHz in oxygen and in O,-NZ mixtures. In order to determine whether actinometry is valid
we … values of the actinometry sigma1 to another diagnostic of atom concentration simultaneously …

… Tbe aim of this work is to investigate the validity of actinometry in the positive column of …
flux of atoms in oxygen atom plasma sources of this kind [8-101. Optical emission actinometry is …

… To reduce the steady-state concentration of F atoms, we promoted recombination by replacing
… and actinometry can be used with confidence as a measure of the relative F atom density. …

… atomic oxygen concentration in etching plasmas. A schematic diagram of the energy levels of
oxygen atoms … -nm emission of F atoms, where the validity of the actinometry technique has …