Agile scanning using a MEMS focus control mirror in a commercial confocal microscope
SJ Lukes, DL Dickensheets - Three-Dimensional and …, 2014 - spiedigitallibrary.org
Three-Dimensional and Multidimensional Microscopy: Image …, 2014•spiedigitallibrary.org
We present the use of a large stroke deformable membrane mirror for focus control over a
range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is
much faster than lens or stage translation allowing synchronization to xy scanning for agile
control over the 3D shape of the surface that is scanned. We describe a novel, low-actuator-
count MEMS mirror designed specifically for focus control in scanning laser microscopes
and present images taken with the mirror deployed on an Olympus Fluoview FV300.
range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is
much faster than lens or stage translation allowing synchronization to xy scanning for agile
control over the 3D shape of the surface that is scanned. We describe a novel, low-actuator-
count MEMS mirror designed specifically for focus control in scanning laser microscopes
and present images taken with the mirror deployed on an Olympus Fluoview FV300.
We present the use of a large stroke deformable membrane mirror for focus control over a range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is much faster than lens or stage translation allowing synchronization to x-y scanning for agile control over the 3D shape of the surface that is scanned. We describe a novel, low-actuator-count MEMS mirror designed specifically for focus control in scanning laser microscopes and present images taken with the mirror deployed on an Olympus Fluoview FV300.
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