AlGaN/GaN HEMTs on Silicon Substrate With 206-GHz

S Bouzid-Driad, H Maher, N Defrance… - IEEE Electron …, 2012 - ieeexplore.ieee.org
S Bouzid-Driad, H Maher, N Defrance, V Hoel, JC De Jaeger, M Renvoise, P Frijlink
IEEE Electron Device Letters, 2012ieeexplore.ieee.org
This letter reports on AlGaN/GaN high-electron-mobility transistors (HEMTs) on high-
resistive silicon substrate with a record maximum oscillation cutoff frequency F MAX. Double-
T-shaped gates are associated with an optimized technology to enable high-efficiency 2-D
electron gas control while mitigating the parasitic resistances. Good results ogate-length
HEMTf F MAX= 206 GHz and FT= 100 GHz are obtained for a 90-nm gate-length HEMT with
0.25-μm source-to-gate spacing. The associated peak extrinsic transconductance value is …
This letter reports on AlGaN/GaN high-electron-mobility transistors (HEMTs) on high-resistive silicon substrate with a record maximum oscillation cutoff frequency F MAX . Double-T-shaped gates are associated with an optimized technology to enable high-efficiency 2-D electron gas control while mitigating the parasitic resistances. Good results ogate-length HEMTf F MAX = 206 GHz and FT = 100 GHz are obtained for a 90-nm gate-length HEMT with 0.25-μm source-to-gate spacing. The associated peak extrinsic transconductance value is as high as 440 mS·mm -1 . To the authors' knowledge, the obtained F MAX and Gm ext are the highest reported values for GaN HEMTs technology on silicon substrate. The accuracy of the cutoff frequency values is checked by small-signal modeling based on extracted S-parameters.
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