An electrostatic probe technique for RF plasma
NSJ Braithwaite, NMP Benjamin… - Journal of Physics E …, 1987 - iopscience.iop.org
The use of electrostatic probes in radio frequency (RF) generated plasmas is discussed. A
technique is demonstrated in which the RF potential difference between probe and plasma
is removed by driving the probe with synchronous RF of suitable phase and amplitude. An
application of this technique is the measurement of electrical structure within a 13.56 MHz
argon discharge.
technique is demonstrated in which the RF potential difference between probe and plasma
is removed by driving the probe with synchronous RF of suitable phase and amplitude. An
application of this technique is the measurement of electrical structure within a 13.56 MHz
argon discharge.
An electrostatic probe technique for RF plasma
B NMP - 1987 - arch.neicon.ru
The use of electrostatic probes in radio frequency (RF) generated plasmas is discussed. A
technique is demonstrated in which the RF potential difference between probe and plasma
is removed by driving the probe with synchronous RF of suitable phase and amplitude. An
application of this technique is the measurement of electrical structure within a 13.56 MHz
argon discharge.
technique is demonstrated in which the RF potential difference between probe and plasma
is removed by driving the probe with synchronous RF of suitable phase and amplitude. An
application of this technique is the measurement of electrical structure within a 13.56 MHz
argon discharge.
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