An optimized analog drive-mode controller for vibratory MEMS gyroscopes

B Eminoglu, SE Alper, T Akin - Procedia Engineering, 2011 - Elsevier
B Eminoglu, SE Alper, T Akin
Procedia Engineering, 2011Elsevier
This paper presents an optimized analytical design procedure for the drive mode analog
controllers used in vibratory MEMS gyroscopes. The behaviour of the controller during start-
up is analyzed in detail including the effect of the limited voltage swing of the controller
circuitry. As a result, an optimum design procedure is developed for controller design, which
is also experimentally verified in a practical implementation demonstrating a settling time of
only 50msec without any overshoot, for a gyroscope having a quality factor (Q-factor) of …
This paper presents an optimized analytical design procedure for the drive mode analog controllers used in vibratory MEMS gyroscopes. The behaviour of the controller during start-up is analyzed in detail including the effect of the limited voltage swing of the controller circuitry. As a result, an optimum design procedure is developed for controller design, which is also experimentally verified in a practical implementation demonstrating a settling time of only 50msec without any overshoot, for a gyroscope having a quality factor (Q-factor) of 50,000. The new design procedure makes drive mode settling times almost insensitive to the Q-factor, making it suitable to obtain very-fast-starting MEMS gyroscopes even if they are packaged under high-vacuum.
Elsevier
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