Analysis of the hole trapping detrapping component of NBTI over extended temperature range

N Choudhury, N Parihar… - 2020 IEEE International …, 2020 - ieeexplore.ieee.org
2020 IEEE International Reliability Physics Symposium (IRPS), 2020ieeexplore.ieee.org
An Activated Barrier Double Well Thermionic (ABDWT) model is used to calculat e hole
trapping-detrapping (ΔV HT) kinetics, which, together with generation of interface (ΔV IT)
and bulk (ΔV OT) traps, model the time kinetics of threshold voltage shift (ΔV T) during and
after Negative Bias Temperature Instability (NBTI) stress over an extended temperature
range (T:+ 165 to-40° C). Transient Trap Occupancy Model (TTOM) enabled Reaction-
Diffusion (RD) model is used for ΔV IT and empirical stretched exponential equations are …
An Activated Barrier Double Well Thermionic (ABDWT) model is used to calculat e hole trapping-detrapping (ΔV HT ) kinetics, which, together with generation of interface (ΔV IT ) and bulk (ΔV OT ) traps, model the time kinetics of threshold voltage shift (ΔV T ) during and after Negative Bias Temperature Instability (NBTI) stress over an extended temperature range (T: +165 to -40 °C). Transient Trap Occupancy Model (TTOM) enabled Reaction-Diffusion (RD) model is used for ΔV IT and empirical stretched exponential equations are used for ΔV OT . The overall BTI Analysis Tool (BAT) framework is used to model ultra-fast ΔV T time kinetics from Gate First (GF) High-K Metal Gate (HKMG) Fully Depleted Silicon on Insulator (FDSOI) MOSFETs and Replacement Metal Gate (RMG) HKMG SOI FinFETs (SOIFF).
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