Annealing is one of starch physical modification techniques that can increase resistant starch (RS) content. However, the effect of annealing on RS varies based on botanical sources. Starch crystal type and relative crystallinity are two important characteristics of starch. This study aimed to compare the influence of annealing on starch crystallinity and different starch crystal type (A, B and C) and investigate its effect on RS content by literature meta‐analysis study. The literature review was carried out using 22 research articles and 101 data points. The result showed relative crystallinity increase from the highest changes to the lowest, respectively; C‐type crystal (18.98%) followed by B (13.60%) and A‐type crystal (8.17%). Meta‐analysis study results showed a significant increase of RS content on starches with A‐type crystal (SMD = 6.46; 95% CI: 3.22–9.70; P < 0.01) and a positive relationship between the degree of crystallinity and RS content after annealing modification.