research interests on account of the discovery of its superior ferroelectricity. Initial studies
suggest that the Al 1-x Sc x N may suffer from large leakage current and poor endurance,
which may hinder its further thickness scaling and long-term reliability. In this work, we study
the evolution of leakage current of the ferroelectric Al 0.7 Sc 0.3 N-based capacitor by
bipolar and unipolar cycling tests. We observe that the leakage current dramatically …