Bonding and stoichiometry in low-energy radio frequency magnetron sputtered ZnO thin films on flexible substrate
CE Iheomamere, CL Arnold, UP Rathod, KD Omotosho… - Vacuum, 2021 - Elsevier
Spectroscopic and electrical studies of ZnO thin films grown by radio frequency magnetron
sputtering at low power without substrate heating revealed improved stoichiometry and
reduced free carrier concentration with increasingly energetic growth conditions, which is
opposite to what is typically observed. Hall measurements showed a decrease in carrier
concentration from 6.9× 10 19 cm− 3 to 1.4× 10 19 cm− 3 as power increased from 40 W to
120 W, and a decrease in carrier concentration from 8.6× 10 19 cm− 3 to 2.6× 10 19 cm− 3 …
sputtering at low power without substrate heating revealed improved stoichiometry and
reduced free carrier concentration with increasingly energetic growth conditions, which is
opposite to what is typically observed. Hall measurements showed a decrease in carrier
concentration from 6.9× 10 19 cm− 3 to 1.4× 10 19 cm− 3 as power increased from 40 W to
120 W, and a decrease in carrier concentration from 8.6× 10 19 cm− 3 to 2.6× 10 19 cm− 3 …
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