Broadband polarization beam splitters based on MMI couplers with internal photonic crystals fabricated using 193 nm photolithography
2021 Optical Fiber Communications Conference and Exhibition (OFC), 2021•ieeexplore.ieee.org
… However, the length of the MMI coupler has to be the common multiple of the first self-imaging
lengths for two polarizations, a requirement that is generally challenging to be achieved. In
this paper, we design and experimentally demonstrate broadband PBSs based on MMI
couplers with internal photonic crystals (PCs), fabricated on an SOI wafer with a 220-nm-thick
top silicon layer covered by oxide cladding. As the internal PC only possesses photonic
bandgap for the TE polarization, it will reflect the TEpolarized light while transmit the TM-polarized …
lengths for two polarizations, a requirement that is generally challenging to be achieved. In
this paper, we design and experimentally demonstrate broadband PBSs based on MMI
couplers with internal photonic crystals (PCs), fabricated on an SOI wafer with a 220-nm-thick
top silicon layer covered by oxide cladding. As the internal PC only possesses photonic
bandgap for the TE polarization, it will reflect the TEpolarized light while transmit the TM-polarized …
We demonstrate a silicon photonic MMI-coupler-based polarization beam splitter, fabricated using 193 nm photolithography. Measured extinction ratios beyond 30 dB and insertion losses below 3 dB are achieved over a record bandwidth of 111 nm.
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