Bulk-Si photonics technology for DRAM interface
H Byun, J Bok, K Cho, K Cho, H Choi, J Choi… - Photonics …, 2014 - opg.optica.org
We present photonics technology based on a bulk-Si substrate for cost-sensitive dynamic
random-access memory (DRAM) optical interface application. We summarize the progress
on passive and active photonic devices using a local-crystallized Si waveguide fabricated by
solid phase epitaxy or laser-induced epitaxial growth on bulk-Si substrate. The process of
integration of a photonic integrated circuit (IC) with an electronic IC is demonstrated using a
65 nm DRAM periphery process on 300 mm wafers to prove the possibility of seamless …
random-access memory (DRAM) optical interface application. We summarize the progress
on passive and active photonic devices using a local-crystallized Si waveguide fabricated by
solid phase epitaxy or laser-induced epitaxial growth on bulk-Si substrate. The process of
integration of a photonic integrated circuit (IC) with an electronic IC is demonstrated using a
65 nm DRAM periphery process on 300 mm wafers to prove the possibility of seamless …
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