This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in
sensory systems. An overview of the CMOS–MEMS resonators acting as filters for signal
processing is also included. Special emphasis will be given to the different technological
fabrication approaches and their performance, providing specific figures of merit for their
comparison as stand-alone resonator as well as oscillator and filter. This review contributes …