… from partitioned logic and sensor array wafers built in separate … The smaller, recessed
dielectric surface area between the … dielectric bond with surface deflection at opposed dielectric …

… HfSiON gate dielectric is integrated for the first time in dual gate oxide of DRAM with recess
channel … The cross-sectional TEM image and the gate stack structure of recess channel array …

… Some of the latest technologies developed with hybrid bonding technology are image …
dielectric shows a slope of less than 1 nm/μm. For 3 μm via arrays, the topography recess is …

… This angled light travels through the thick inter-dielectric layer and it may be collected by a …
pixel array and four levels of metals in the array periphery. In addition to the recessed backend…

… It has also recently been adopted for high-end CMOS image sensor applications owing to …
minimal dielectric erosion around bonding pad arrays and with the correct protruding or recess …

… first focus on shallow trench isolations, inter layer dielectrics (ILD) and gate oxides using thick
… photodiodes with recessed field oxides. We chose to use a large recess distance, about 5 …

… is recessed below the dielectric surface, whereas a 'protrusion' occurs when the copper via
surface is elevated above the dielectric … arrays with pixel-level optics array and CMOS image …

… The Adaptive Focal Plane Array (AFPA) is a new spectral imaging technology integrating an
… of the thick dielectric coatings. The silicon is then etched using DRIE to recess the dielectric …

… The top dielectric coating is 300 nm thick. The second … and a dielectric coating patterned
with an array of recessed wells … Figure 3b shows a dark field optical microscope image taken …

… applications and for a variety of sensor needs. For the most … bottom of recesses etched into
the dielectric stack covering a … 3 array of VCSEL pills bonded in recesses on a CMOS chip …