microengineered ferroelectric chip. In our design, large deflection angles are achieved by
cascading several smaller scanners in a single ferroelectric chip, such that each successive
scanner stage builds upon the deflection of the previous stage. We demonstrate the basic
concept using a two-stage device fabricated in a single crystal wafer of ferroelectric LiTaO3.
By operating the device using a specially designed programmable multichannel driver that …