connected to a room-temperature thermal bath, for which there are stringent requirements
on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes
with unprecedented products of mechanical quality factor Q m and frequency ν m reaching Q
m ν m≃ 2× 10 13 Hz. The SiN membranes exhibit a low optical absorption characterized by
Im (n)≲ 10-5 at 935 nm, representing a 15 times reduction for SiN membranes. We have …