Challenge in determining the crystal structure of epitaxial 0001 oriented sp2-BN films

M Chubarov, H Högberg, A Henry… - Journal of Vacuum …, 2018 - pubs.aip.org
Boron nitride (BN) as a thin film is promising for many future electronic applications. On 0001
α-Al 2 O 3 and 0001 4H/6H-SiC substrates, chemical vapor deposition yields epitaxial sp 2-
hybridized BN (sp 2-BN) films oriented around the c-axis. Here, the authors seek to point out
that sp 2-BN can form two different polytypes; hexagonal BN (h-BN) and rhombohedral BN (r-
BN), only differing in the stacking of the basal planes but with the identical distance between
the basal planes and in-plane lattice parameters. This makes structural identification …
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