Deep-UV patterning of commercial grade PMMA for low-cost, large-scale microfluidics

M Haiducu, M Rahbar, IG Foulds… - Journal of …, 2008 - iopscience.iop.org
M Haiducu, M Rahbar, IG Foulds, RW Johnstone, D Sameoto, M Parameswaran
Journal of Micromechanics and Microengineering, 2008iopscience.iop.org
Although PMMA can be exposed using a variety of exposure sources, deep-UV at 254 nm is
of interest because it is relatively inexpensive. Additionally, deep-UV sources can be readily
scaled to large area exposures. Moreover, this paper will show that depths of over 100µm
can be created in commercial grade PMMA using an uncollimated source. These depths are
sufficient for creating microfluidic channels. This paper will provide measurements of the
dissolution depth of commercial grade PMMA as a function of the exposure dose and etch …
Abstract
Although PMMA can be exposed using a variety of exposure sources, deep-UV at 254 nm is of interest because it is relatively inexpensive. Additionally, deep-UV sources can be readily scaled to large area exposures. Moreover, this paper will show that depths of over 100µm can be created in commercial grade PMMA using an uncollimated source. These depths are sufficient for creating microfluidic channels. This paper will provide measurements of the dissolution depth of commercial grade PMMA as a function of the exposure dose and etch time, using an IPA: H 2 O developer. Additionally, experiments were run to characterize the dependence of the dissolution rate on temperature and agitation. The patterned substrates were thermally bonded to blank PMMA pieces to enclose the channels and ports were drilled into the reservoirs. The resulting fluidic systems were then tested for leakage. The work herein presents the patterning, development and system behaviour of a complete microfluidics system based on commercial grade PMMA.
iopscience.iop.org
以上显示的是最相近的搜索结果。 查看全部搜索结果

Google学术搜索按钮

example.edu/paper.pdf
搜索
获取 PDF 文件
引用
References