Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability
Measurement Science and Technology, 2024•iopscience.iop.org
This paper presents an efficient design approach for microelectromechanical systems
(MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator
Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant
gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize
the gyroscope's performance. The device features a size of $1.8 {\text {}}\times 2.772 {\text
{m}}{{\text {m}}^ 2} $
(MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator
Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant
gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize
the gyroscope's performance. The device features a size of $1.8 {\text {}}\times 2.772 {\text
{m}}{{\text {m}}^ 2} $
Abstract
This paper presents an efficient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize the gyroscope's performance. The device features a size of
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